
The CMMP group at the Florida State University Department of Physics has a Tencor AlphaStep 200 scanning profilometer that is available to the local research community. There are no fees for use of this instrument.
The scanning profilometer is a complement to
SEM (scanning electron microscopy) and
SPM (scanning probe microscopy). A stylus, typically with a radius of 5.0 um or 12.5 um, is scanned across the surface. The mechanical advantage of a long cantilever attached to the stylus allows precise measurement of surface topography. Common applications include: thin film thickness; profiling photo-lithographed structures; surface roughness (Ra). Profiles can be printed out on thermal paper.
Advantages: fast; very large scan lengths; very large vertical depths; good vertical resolution when lateral resolution is not needed; cost.
Disadvantages: 1D scans, not 2D images; non-trivial stylus normal force; poor lateral resolution.
Specifications:
Vertical Range: +/- 160 kA in kilo-Angstrom mode; +/- 160 um in micrometer mode.
Maximum Scan Length: 10,000 um.
Vertical Resolution: 5 A in kilo-Angstrom mode; 5 nm in micrometer mode.
Horizontal Resolution: 400 A.
Accuracy: ~ 1% typical.
Stylus Force: 1-25 mg.
Maximum Sample Dimensions: 16.5 mm thick x 162 mm diameter.